NIR-CW-laser annealing of room temperature sputtered ZnO:Al

verfasst von

Viktor Schütz, V. Sittinger, S. Götzendörfer, C. C. Kalmbach, R. Fu, Philipp von Witzendorff, C. Britze, Oliver Suttmann, Ludger Overmeyer

Abstract

Transparent Conducting Oxides (TCOs) are widespread as transparent electrodes in thin film photovoltaics and electronics. Post deposition furnace annealing improves the electrical and optical properties of TCOs. Disadvantages of furnace annealing are large energy consumption and long processing time due to long-lasting heating ramps. ZnO:Al thin films (AZO) with a low electrical resistivity and high transparency are usually sputtered at substrate temperatures up to several hundred °C. In this study post deposition near infrared (NIR) continuous wave (CW) laser annealing of room-temperature deposited AZO thin films is investigated. The surface temperature is determined by infrared thermography. The averaged transmittance is increased by T_{300-1100 nm} ≤ 7.2 % due to a lower absorptance at a constant reflectance. The resistivity is reduced to ρ = 360 μΩcm, because of a higher electron mobility μ. These promising results show the potential of laser annealing for the replacement of furnace annealing in industrial applications.

Externe Organisation(en)

Laser Zentrum Hannover e.V. (LZH)
Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST)
Berliner Glas Surface Technology

Typ

Konferenzaufsatz in Fachzeitschrift

Journal

Physics Procedia

Band

56

Seiten

1073-1082

Anzahl der Seiten

10

ISSN

1875-3884

Publikationsdatum

09.09.2014

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Allgemeine Physik und Astronomie

Ziele für nachhaltige Entwicklung

SDG 7 – Erschwingliche und saubere Energie

Elektronische Version(en)

https://doi.org/10.1016/j.phpro.2014.08.020 (Zugang: Offen)